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Depth-Profile Analysis of Nanostructures by SIMS: Depth Resolution Function by fuerza-b is a document available to read on EtoBox.

A new model of the depth-resolution function for secondary-ion mass spectrometry is considered. It takes into account recoil implantation, ion mixing, and surface roughness formation under irradiation. A simple three-parameter equation is proposed to describe the depth resolution function.

Author
fuerza-b
Language
EN