About this scholarly article

SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, California, USA (Sunday 3 August 2003)] Wave-Optical Systems Engineering II - Lithographic image simulation for the 21st century with 19th-century tools by Gordon, Ronald L.; Wyrowski, Frank; Rosenbluth, Alan E. is a scholarly article available to read on EtoBox.

Author

Gordon, Ronald L.; Wyrowski, Frank; Rosenbluth, Alan E.

Publisher

SPIE

Published

2004