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About this Engineering article
Characterization of a SAW-Pirani vacuum sensor for two different operating modes by D. Mercier; G. Bordel; P. Brunet-Manquat; S. Verrun; O. Elmazria; F. Sarry; B. Belgacem; J. Bounoua is a Engineering article available to read on EtoBox.
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- Author
- D. Mercier; G. Bordel; P. Brunet-Manquat; S. Verrun; O. Elmazria; F. Sarry; B. Belgacem; J. Bounoua
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0924-4247)
- Published
- 2012
- Field
- Engineering (Physical Sciences)