Opening book details…
About this Materials Science article
Improvement in electrical properties of SOI-SIMNI films by multiple-step implantation by Dian-Tong Lu; Heiner Ryssel is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Dian-Tong Lu; Heiner Ryssel
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 1567-1739)
- Published
- 2001
- Language
- EN
- Field
- Materials Science (Physical Sciences)