About this scholarly article

SPIE Proceedings [SPIE 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies - Dalian, China (Monday 26 April 2010)] 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems - Soft substrate as a sacrificial layer for fabrication free-standing… by Li, Xiaojun; Ye, Tianchun; Han, Sen; Wang, Xudi; Jin, Jian; Kameyama, Masaomi; Hu, Song; Li, Xin; Tian, Yangchao; Fu, Shaojun is a scholarly article available to read on EtoBox.

Author

Li, Xiaojun; Ye, Tianchun; Han, Sen; Wang, Xudi; Jin, Jian; Kameyama, Masaomi; Hu, Song; Li, Xin; Tian, Yangchao; Fu, Shaojun

Publisher

SPIE

Published

2010

Language

EN