Opening book details…
About this Engineering article
Growth and Characterization of Ferroelectric Pb(Zr,Ti)OM3 Thin Films by Mocvd Using A 6 Inch Single Wafer Cvd System by Shimizu, Masaru; Fujimoto, Masashi; Katayama, Takuma; Shiosaki, Tadashi; Nakaya, Kenichi; Fukagawa, Mitsuru; Tanikawa, Eiki is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Shimizu, Masaru; Fujimoto, Masashi; Katayama, Takuma; Shiosaki, Tadashi; Nakaya, Kenichi; Fukagawa, Mitsuru; Tanikawa, Eiki
- Publisher
- Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
- Published
- 1993
- Language
- EN
- Field
- Engineering (Physical Sciences)