About this scholarly article

SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Optical Microlithography XVII - Initial assessment of the lithographic impact of the use of hard pellicles: an overview by De Bisschop, Peter; Smith, Bruce W.; Kocsis, Michael K.; Bruls, Richard; Grenville, Andrew; Van Peski, Chris is a scholarly article available to read on EtoBox.

Author

De Bisschop, Peter; Smith, Bruce W.; Kocsis, Michael K.; Bruls, Richard; Grenville, Andrew; Van Peski, Chris

Publisher

SPIE

Published

2004

Language

EN