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About this Engineering article
Simulation and optimization of silicon thermal CVD through CFD integrating Taguchi method by W.T. Cheng; H.C. Li; C.N. Huang is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- W.T. Cheng; H.C. Li; C.N. Huang
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 1385-8947)
- Published
- 2008
- Field
- Engineering (Physical Sciences)