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What is Mass Flow in Silicon Micromachined Channels about?
This document summarizes an experiment measuring the tangential momentum accommodation coefficient (TMAC) for gases flowing through silicon micromachined channels. The experiment found that for nitrogen, argon, and carbon dioxide flowing over silicon surfaces, the TMAC was lower than 1, ranging from 0.75 to 0.85. This indicates incomplete momentum transfer between the gas molecules and silicon surface. The experiment used precise mass flow measurements through long microchannels to extract the TMAC over a r
- Author
- Mauricio Fabian Duque Daza
- Language
- EN