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AIP Conference Proceedings - XAS Studies of Chemical Bonding of Nitrogen and Oxygen Atoms in Ti/Zr/Hf High-K Gate Dielectrics by Seo, Hyungtak; Lee, Sanghyun; Ju, Byoung; Lucovsky, Gerald; Lüning, Jan is a Physics and Astronomy article available to read on EtoBox.

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Author
Seo, Hyungtak; Lee, Sanghyun; Ju, Byoung; Lucovsky, Gerald; Lüning, Jan
Publisher
AIP
Published
2007
Language
EN
Field
Physics and Astronomy (Physical Sciences)

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