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About this Engineering article
On chemomechanical polishing of Si 3 N 4 with Cr 2 O 3 by Bhagavatula, S. R.; Komanduri, R. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Bhagavatula, S. R.; Komanduri, R.
- Publisher
- Taylor and Francis Group; Informa UK (Taylor & Francis); Taylor & Francis; Informa UK Limited (ISSN 0141-8610)
- Published
- 1996
- Language
- EN
- Field
- Engineering (Physical Sciences)