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About this Engineering article
Formation of SEM Images in the Secondary Electron Mode. 2. Structures with a Trapezoidal Profile and Small Side-Wall Inclinations by Novikov, Yu. A. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Novikov, Yu. A.
- Publisher
- Pleiades Publishing; Pleiades Publishing Ltd (ISSN 1027-4510)
- Published
- 2019
- Field
- Engineering (Physical Sciences)