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Ion Energy Effects on DLC Film Properties by sadjerourou is a document available to read on EtoBox.
The study investigates the effects of gas-phase species and ion energy on diamond-like carbon (DLC) films deposited via inductively coupled plasmas of Ar and CH4/Ar. It utilizes gas-phase diagnostics, including Langmuir probes and mass spectrometry, to analyze ion energy distributions and their impact on film properties such as hardness and hydrogen content. The findings indicate that ion energy significantly influences the composition and morphology of the deposited DLC films, with variations in substrate
- Author
- sadjerourou
- Language
- EN