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About this Engineering article
New Developments of Less Toxic Group-V Precursors for the Metalorganic Vapour Phase Epitaxy of III–V-Semiconductors: In -Situ-Formation of As–H Functions by Thermal β-Elimination of Specific As-Trialkyl Compounds by Zimmermann, Gunnar; Spika, Zeljko; Marschner, Thomas; Stolz, Wolfgang; Göbel, Ernst O.; Gimmnich, Peter; Becker, Ralf; Lorberth, Jörg; Greiling, Arnd; Salzmann, Andreas is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Zimmermann, Gunnar; Spika, Zeljko; Marschner, Thomas; Stolz, Wolfgang; Göbel, Ernst O.; Gimmnich, Peter; Becker, Ralf; Lorberth, Jörg; Greiling, Arnd; Salzmann, Andreas
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 1996
- Field
- Engineering (Physical Sciences)