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Can I read Spectroscopic Photon Emission Microscopy: a Unique Tool for Failure Analysis of Microelectronics Devices on EtoBox?
Spectroscopic Photon Emission Microscopy: a Unique Tool for Failure Analysis of Microelectronics Devices by Ingrid De Wolf; Mahmoud Rasras is a Engineering article available to read on EtoBox.
What is Spectroscopic Photon Emission Microscopy: a Unique Tool for Failure Analysis of Microelectronics Devices about?
Photon emission microscopy (PEM) is a technique used commonly for failure analysis of microelectronics chips. This technique has it limitations: it can only be used to indicate the place of the failure. In most cases, this is not enough to allow a de®nition of the failure, i.e. to ®nd out whether it is due to a gate oxide breakdown, a metal short, a junction spiking, etc. In this paper spectral PEM is discussed. It is shown that the spectrum of the light emitted by the failure may oer valuable information about the identity of the failure.
Who reads Spectroscopic Photon Emission Microscopy: a Unique Tool for Failure Analysis of Microelectronics Devices?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Ingrid De Wolf; Mahmoud Rasras
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0026-2714)
- Published
- 2001
- Language
- EN
- Field
- Engineering (Physical Sciences)