About this scholarly article

2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus) - Process optimization of silicon-on-sapphire vapor-phase epitaxy by Fedotov, Sergey D.; Smirnov, Dmitry I.; Sokolov, Evgeniy M.; Statsenko, Vladimir N. is a scholarly article available to read on EtoBox.

Author

Fedotov, Sergey D.; Smirnov, Dmitry I.; Sokolov, Evgeniy M.; Statsenko, Vladimir N.

Publisher

IEEE

Published

2018

Language

EN