About this scholarly article

2002 IEEE Ultrasonics Symposium, 2002. Proceedings. - Development of nonresonant ultrasonic motor with sub-nanometer resolution by Egashira, Y.; Kosaka, K.; Endo, T.; Hashiguchi, H.; Nagamoto, K.; Watanabe, M.; Yamakawa, T.; Nakada, A.; Kubota, H.; Ohmi, T. is a scholarly article available to read on EtoBox.

Author

Egashira, Y.; Kosaka, K.; Endo, T.; Hashiguchi, H.; Nagamoto, K.; Watanabe, M.; Yamakawa, T.; Nakada, A.; Kubota, H.; Ohmi, T.

Publisher

IEEE

Published

2002