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Can I read Multilayer ISFET membranes for microsystems applications on EtoBox?
Multilayer ISFET membranes for microsystems applications by C Cané; A Götz; A Merlos; I Gràcia; A Errachid; P Losantos; E Lora-Tamayo is a Engineering article available to read on EtoBox.
What is Multilayer ISFET membranes for microsystems applications about?
The fabrication of microsystems in which chemical measurements play a role make the on-chip combination of chemical sensors and signal processing circuitry highly desirable. Chemical sensors use sensitive layers which are not a part of MOS devices and in this sense, the determination of the best sensors and technological processes to achieve good integrated smart sensors is very important, in this paper a study of compatibility of ISFET chemical sensors and CMOS circuitry is presented for application to biomedical microsysterns.
Who reads Multilayer ISFET membranes for microsystems applications?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- C Cané; A Götz; A Merlos; I Gràcia; A Errachid; P Losantos; E Lora-Tamayo
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0925-4005)
- Published
- 1996
- Language
- EN
- Field
- Engineering (Physical Sciences)
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