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About this Materials Science article
Effect of Sputtering Parameters and Substrate Composition on the Structure of Tantalum Thin Films by Hallmann, Lubica; Ulmer, Peter is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Hallmann, Lubica; Ulmer, Peter
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0169-4332)
- Published
- 2013
- Language
- EN
- Field
- Materials Science (Physical Sciences)