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About this Engineering article
Ion beam synthesis of aluminium nitride: characterisation of thin AIN layers formed in microelectronics aluminium by Calvo-Barrio, L.; Pérez-Rodríguez, A.; Romano-Rodríguez, A.; Morante, J. R.; Montserrat, J. is a Engineering article available to read on EtoBox.
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- Author
- Calvo-Barrio, L.; Pérez-Rodríguez, A.; Romano-Rodríguez, A.; Morante, J. R.; Montserrat, J.
- Publisher
- Institute of Materials, Minerals and Mining; Maney Publishing; Informa UK Limited (ISSN 0267-0836)
- Published
- 1995
- Field
- Engineering (Physical Sciences)