About this scholarly article

2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - Measurement of large forces and deflections in microstructures by Hals, Kai Axel; Halvorsen, Einar; Xuyuan Chen, is a scholarly article available to read on EtoBox.

Author

Hals, Kai Axel; Halvorsen, Einar; Xuyuan Chen,

Publisher

IEEE

Published

2008