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About this book
AlN epitaxy on SiC by low-temperature atomic layer deposition via layer-by-layer, in situ atomic layer annealing by Wei-Chung Kao & Wei-Hao Lee & Sheng-Han Yi & Tsung-Han Shen & Hsin-Chih Lin & Miin-Jang Chen is a book available to read on EtoBox.
- Author
- Wei-Chung Kao & Wei-Hao Lee & Sheng-Han Yi & Tsung-Han Shen & Hsin-Chih Lin & Miin-Jang Chen
- Publisher
- Royal Society of Chemistry
- Language
- EN
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