About this scholarly article

IEEE Conference Record - Abstracts. 2002 IEEE International Conference on Plasma Science (Cat. No.02CH37340) - Low pressure behaviour of the sputter magnetron discharge by Buyle, G.; Depla, D.; De Bosscher, W.; Eufinger, K.; Haemers, J.; De Gryse, R. is a scholarly article available to read on EtoBox.

Author

Buyle, G.; Depla, D.; De Bosscher, W.; Eufinger, K.; Haemers, J.; De Gryse, R.

Publisher

IEEE

Published

2002