About this scholarly article

SPIE Proceedings [SPIE 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Munich, Germany (Monday 15 November 1999)] 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Performance study on thin resist for advanced reticle fabrication by Kobayashi, Hideo; Higuchi, Takao; Asakawa, Keishi; Yokoya, Yasunori; Behringer, Uwe F. W. is a scholarly article available to read on EtoBox.

Author

Kobayashi, Hideo; Higuchi, Takao; Asakawa, Keishi; Yokoya, Yasunori; Behringer, Uwe F. W.

Publisher

SPIE

Published

2000

Language

EN