About this scholarly article

1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat No.99CH36314) - Advanced defect-kill-rate estimation and yield analysis incorporating defect clustering by Kikuchi, H.; Nishio, N.; Ikeyama, K.; Misumi, A. is a scholarly article available to read on EtoBox.

Author

Kikuchi, H.; Nishio, N.; Ikeyama, K.; Misumi, A.

Publisher

IEEE

Published

1999

Language

EN