About this scholarly article

Monitoring of Industrial Plasma Processes Using the Multipole Resonance Probe by Pohle, Dennis (author);Schulz, Christian (author);Oberberg, Moritz (author);Awakowicz, Peter (author);Rolfes, Ilona (author) is a scholarly article available to read on EtoBox.

Author

Pohle, Dennis (author);Schulz, Christian (author);Oberberg, Moritz (author);Awakowicz, Peter (author);Rolfes, Ilona (author)

Publisher

Institute of Electrical and Electronics Engineers Inc.

Published

2019