About this Engineering article
Susceptor-assisted Microwave Annealing for Activation of Arsenic Dopants in Silicon by T.L. Alford; Mandar J. Gadre; Rajitha N.P. Vemuri; N. David Theodore is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- T.L. Alford; Mandar J. Gadre; Rajitha N.P. Vemuri; N. David Theodore
- Publisher
- Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)
- Published
- 2012
- Field
- Engineering (Physical Sciences)