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About this Engineering article

Susceptor-assisted Microwave Annealing for Activation of Arsenic Dopants in Silicon by T.L. Alford; Mandar J. Gadre; Rajitha N.P. Vemuri; N. David Theodore is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author
T.L. Alford; Mandar J. Gadre; Rajitha N.P. Vemuri; N. David Theodore
Publisher
Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)
Published
2012
Field
Engineering (Physical Sciences)