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About this Engineering article

Nucleation Studies of HfO2 Thin Films Produced by Atomic Layer Deposition by Hackley, Justin C.; Demaree, J. Derek; Gougousi, Theodosia is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author
Hackley, Justin C.; Demaree, J. Derek; Gougousi, Theodosia
Publisher
Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
Published
2007
Field
Engineering (Physical Sciences)

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