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About this Engineering article
Material and optical properties of low-temperature NH3-free PECVD SiNxlayers for photonic applications by Domínguez Bucio, Thalía; Khokhar, Ali Z; Lacava, Cosimo; Stankovic, Stevan; Mashanovich, Goran Z; Petropoulos, Periklis; Gardes, Frederic Y is a Engineering article available to read on EtoBox.
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- Author
- Domínguez Bucio, Thalía; Khokhar, Ali Z; Lacava, Cosimo; Stankovic, Stevan; Mashanovich, Goran Z; Petropoulos, Periklis; Gardes, Frederic Y
- Publisher
- Institute of Physics; IOP Publishing; Institute of Physics Publishing (ISSN 0022-3727)
- Published
- 2016
- Field
- Engineering (Physical Sciences)