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Impact of Hexamethyldisiloxane Admixtures on the Discharge Characteristics of a Dielectric Barrier Discharge in Argon for Thin Film Deposition by Loffhagen, Detlef; Becker, Markus M.; Czerny, Andreas K.; Philipp, Jens; Klages, Claus-Peter is a Physics and Astronomy article available to read on EtoBox.

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Author
Loffhagen, Detlef; Becker, Markus M.; Czerny, Andreas K.; Philipp, Jens; Klages, Claus-Peter
Publisher
John Wiley and Sons; Wiley (John Wiley & Sons); Wiley-VCH Verlag; Wiley - V C H Verlag GmbbH & Co.; Wiley (ISSN 0005-8025)
Published
2017
Language
EN
Field
Physics and Astronomy (Physical Sciences)

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