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What is Deal-Grove Model for Oxide Growth about?

The Deal-Grove model is a well-established model for thermal oxide growth proposed in the 1960s. It assumes oxidation occurs via a one-dimensional process of oxidant transport. The model contains two parameters, α and β, which represent the linear and parabolic rate constants. Both α and β depend on temperature according to Arrhenius expressions and increase with temperature as the oxidation rate increases. The activation energies associated with α and β provide insight into the physical processes they repr

Author

ChithraParameswaran

Language

EN