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About this Engineering article
Sub-quarter-micrometer n-channel MOSFET's fabricated with direct ion-beam Nitridation by Han-Sheng Lee; Puzio, L.C. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Han-Sheng Lee; Puzio, L.C.
- Publisher
- IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 0018-9383)
- Published
- 1987
- Field
- Engineering (Physical Sciences)