About this document
DC Magnetron Sputtering System Guide by Sathish Chander Dhanabalan is a document available to read on EtoBox.
The document describes the components and operating procedure of a DC magnetron sputtering system. The main components are a vacuum chamber, hydraulic lift, magnetron source, gas feedthrough, substrate holder, and vacuum pumping system. The procedure involves achieving high vacuum, introducing argon gas, applying power to the magnetron to sputter material onto the substrate, and safely shutting down the system. Safety cautions are provided such as ensuring proper cooling and vacuum when not in use.
- Author
- Sathish Chander Dhanabalan
- Language
- EN