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About this Engineering article
Submicrometer Patterning of Cobaltdisilicide Layers by Local Oxidation by F. Klinkhammer; M. Dolle; L. Kappius; S. Mantl is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- F. Klinkhammer; M. Dolle; L. Kappius; S. Mantl
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0167-9317)
- Published
- 1997
- Field
- Engineering (Physical Sciences)
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