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About this Engineering article
Scanning capacitance microscopy: Quantitative carrier profiling down to nanostructures by F. Giannazzo; V. Raineri; S. Mirabella; G. Impellizzeri; F. Priolo; M. Fedele; R. Mucciato is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- F. Giannazzo; V. Raineri; S. Mirabella; G. Impellizzeri; F. Priolo; M. Fedele; R. Mucciato
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-211X)
- Published
- 2006
- Language
- EN
- Field
- Engineering (Physical Sciences)