About this scholarly article

2012 International Conference on Optical MEMS and Nanophotonics - A spatial light modulator fabricated with bionano-crystallized poly-Si film by Kumagai, S.; Tomikawa, T.; Ogawa, S.; Miyachi, S.; Yamashita, I.; Uraoka, Y.; Sasaki, M. is a scholarly article available to read on EtoBox.

Author

Kumagai, S.; Tomikawa, T.; Ogawa, S.; Miyachi, S.; Yamashita, I.; Uraoka, Y.; Sasaki, M.

Publisher

IEEE

Published

2012

Language

EN