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About this Engineering article
Electrical and optical properties of hydrogen plasma treated n-AlGaN films grown by hydride vapor phase epitaxy by A. Y. Polyakov; N. B. Smirnov; A. V. Govorkov; N. V. Pashkova; A. A. Shlensky; K. H. Baik; S. J. Pearton; B. Luo; F. Ren; J. M. Zavada is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- A. Y. Polyakov; N. B. Smirnov; A. V. Govorkov; N. V. Pashkova; A. A. Shlensky; K. H. Baik; S. J. Pearton; B. Luo; F. Ren; J. M. Zavada
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-211X)
- Published
- 2004
- Language
- EN
- Field
- Engineering (Physical Sciences)