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Effect of Sr and La co-doping on structural and electrical properties of RF sputtered PZT thin films by M, Kathiresan; C, Manikandan; S, Premkumar; E, Varadarajan; V, Natarajan; Jayaraj, Madambi K; T., Santhanakrishnan is a Materials Science article available to read on EtoBox.

What is Effect of Sr and La co-doping on structural and electrical properties of RF sputtered PZT thin films about?

## Abstract Doping in lead-zirconate-titanate (PZT) thin films is on the rise for next generation micro-electro-mechanical systems (MEMS) and energy harvesting applications, owing to their improved ferroelectric and piezoelectric properties. Strontium, lanthanum and neodymium like elements are the most exploited for such applications. This paper reports realization of a PZT thin film with strontium and lanthanum co-doping in tandem, Pb~1−x−3y/2~Sr~x~La~y~(Zr~0.56~Ti~0.44~)O~3~ x = 0.06, y = 0.03 (PSLZT), by RF sputtering process. Different process conditions like substrate temperature from 250 °C–350 °C and annealing temperature from 650 °C–750 °C are studied to achieve pyrochlore free PSLZT thin film. The structure, surface morphology, surface topography and ferroelectric characteristics are investigated using x-ray diffraction (XRD), Atomic Force Microscopy (AFM), Field Emission Scanning Electron Microscopy (FE-SEM) and P-E analyser, respectively. Nanoscale polarization switching processes and the local surface displacements are studied to ascertain that the PSLZT thin film exhibits the ferroelectric and piezoelectric properties. Experimental results reveal that the present PSLZT

Who reads Effect of Sr and La co-doping on structural and electrical properties of RF sputtered PZT thin films?

It is typically read by researchers, students, and practitioners in Materials Science.

Author
M, Kathiresan; C, Manikandan; S, Premkumar; E, Varadarajan; V, Natarajan; Jayaraj, Madambi K; T., Santhanakrishnan
Publisher
IOP Publishing; IOP Publishing Ltd. (ISSN 2053-1591)
Published
2020
Language
EN
Field
Materials Science (Physical Sciences)

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