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About this Engineering article
A Wafer-bonded Floating-element Shear Stress Microsensor with Optical Position Sensing by Photodiodes by Padmanabhan, A.; Goldberg, H.; Breuer, K.D.; Schmidt, M.A. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Padmanabhan, A.; Goldberg, H.; Breuer, K.D.; Schmidt, M.A.
- Publisher
- IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 1057-7157)
- Published
- 1996
- Language
- EN
- Field
- Engineering (Physical Sciences)
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