Opening book details…
About this Materials Science article
Effect of radio frequency power on the inductively coupled plasma etched Al0.65Ga0.35N surface by Y. Bai; J. Liu; P. Ma; B. Li; J. Zhu; L.W. Guo; X.Y. Liu is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Y. Bai; J. Liu; P. Ma; B. Li; J. Zhu; L.W. Guo; X.Y. Liu
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0169-4332)
- Published
- 2010
- Language
- EN
- Field
- Materials Science (Physical Sciences)
More by Y. Bai; J. Liu; P. Ma; B. Li; J. Zhu; L.W. Guo; X.Y. Liu
Browse all works by Y. Bai; J. Liu; P. Ma; B. Li; J. Zhu; L.W. Guo; X.Y. Liu