About this scholarly article

Proceedings of the 40th IEEE Conference on Decision and Control (Cat. No.01CH37228) - Experimentally validated multivariable μ feedback controller design for a high-precision wafer stage by van de Wal, M.; van Baars, G.; Sperling, F.; Bosgra, O. is a scholarly article available to read on EtoBox.

Author

van de Wal, M.; van Baars, G.; Sperling, F.; Bosgra, O.

Published

2001

Language

EN