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About this Engineering article
Stress-induced leakage current in ultrathin SiO2 films by Patel, N. K.; Toriumi, A. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Patel, N. K.; Toriumi, A.
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 1994
- Language
- EN
- Field
- Engineering (Physical Sciences)