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About this Chemistry article
Low‐Temperature Atomic Layer Deposition of Copper Metal Thin Films: Self‐Limiting Surface Reaction of Copper Dimethylamino‐2‐propoxide with Diethylzinc by Byoung H. Lee; Jae K. Hwang; Jae W. Nam; Song U. Lee; Jun T. Kim; Sang-M. Koo; A. Baunemann; Roland A. Fischer; Myung M. Sung is a Chemistry article available to read on EtoBox.
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- Author
- Byoung H. Lee; Jae K. Hwang; Jae W. Nam; Song U. Lee; Jun T. Kim; Sang-M. Koo; A. Baunemann; Roland A. Fischer; Myung M. Sung
- Publisher
- John Wiley and Sons; Wiley (John Wiley & Sons); John Wiley & Sons Ltd.; Wiley; Research Square (ISSN 0044-8249)
- Published
- 2009
- Field
- Chemistry (Physical Sciences)