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About this Engineering article
Ionized Cluster Beam Deposition Source for Aluminum and Aluminum Oxide Formation by Ito, Hiroki; Kajita, Naoyuki; Yamaji, Shigeru; Minowa, Yoshibumi is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Ito, Hiroki; Kajita, Naoyuki; Yamaji, Shigeru; Minowa, Yoshibumi
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 1991
- Field
- Engineering (Physical Sciences)
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