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High Aspect Pattern Fabrication by Nano Imprint Lithography Using Fine Diamond Mold by Hirai, Yoshihiko; Yoshida, Satoshi; Takagi, Nobuyuki; Tanaka, Yoshio; Yabe, Hideki; Sasaki, Kei; Sumitani, Hiroaki; Yamamoto, Kazuhiro is a Engineering article available to read on EtoBox.
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- Author
- Hirai, Yoshihiko; Yoshida, Satoshi; Takagi, Nobuyuki; Tanaka, Yoshio; Yabe, Hideki; Sasaki, Kei; Sumitani, Hiroaki; Yamamoto, Kazuhiro
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2003
- Field
- Engineering (Physical Sciences)