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MEMS VCO Performance at 10 GHz by manga_at is a document available to read on EtoBox.

This paper investigates a MEMS-based voltage controlled oscillator (VCO) operating at 10 GHz and compares it to an identical VCO design using only MMIC technology. Simulations and measurements show the MEMS design achieves an 8 dB improvement in phase noise and 4 dB higher output power compared to the MMIC design. This is due to the MEMS resonator having a quality factor of 30, much higher than the quality factor of 12 for integrated resonators in MMIC technologies. The MEMS-based VCO is still under develop

Author
manga_at
Language
EN