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What is ASTM F1394: Particle Testing Method about?

The document outlines the ASTM F1394-92 (Reapproved 2020) standard test method for determining particle contribution from gas distribution system valves, specifically for high-purity gas systems used in semiconductor clean rooms. It details the scope, limitations, terminology, and apparatus required for testing, emphasizing the use of a condensation nucleus counter (CNC) for particle detection. The standard was developed in accordance with international principles for standardization as established by the W

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EN