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About this Engineering article
Resonant Rutherford backscattering spectrometry for carbon diffusion in silicon by K. Saravanan; B.K. Panigrahi; S. Amirthapandian; K.G.M. Nair is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- K. Saravanan; B.K. Panigrahi; S. Amirthapandian; K.G.M. Nair
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0168-583X)
- Published
- 2008
- Field
- Engineering (Physical Sciences)
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