About this scholarly article

1997 IEEE International SOI Conference Proceedings - Salicide process for 400 Å fully-depleted SOI-MOSFETs using NiSi by Deng, F.; Johnson, R.A.; Dubbelday, W.B.; Garcia, G.A.; Asbeck, P.M.; Lau, S.S. is a scholarly article available to read on EtoBox.

Author

Deng, F.; Johnson, R.A.; Dubbelday, W.B.; Garcia, G.A.; Asbeck, P.M.; Lau, S.S.

Publisher

IEEE

Published

1997

Language

EN