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This document summarizes an experiment demonstrating spontaneous mechanical oscillation in a single crystal silicon resonator structure driven by a direct current (DC). When the applied DC current density exceeds a threshold value, the resonator begins oscillating at its fundamental bending resonance frequency of 1.26 MHz. This self-sustained oscillation occurs via an electrothermomechanical feedback effect where the resonator

Author

Voet Zoeker

Language

EN